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LAMBDA SX
LAMBDA SX

LAMBDA SX

High-Power Excimer Lasers

The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability.

LAMBDA SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).

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Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
LAMBDA SX C600
308
600
 1000
600
LAMBDA SX E500
500
1000
500

Applications

Application
Process
Material
• Pulsed Laser Deposition
• Excimer Laser Annealing
• Laser Lift-Off
• 3D-Structuring
• Roll-To-Roll Circuit Patterning
• Ablation-Material Removal
• Ceramic
• Glass
• Polymer
• Plastic
• Metal
• Semiconductor

Features & Benefits

LAMBDA SX Key Feature
Customer Benefit
500 or 600 Watts stabilized UV Power
Fast, large area processing at lowest costs per Watt
1 Joule nano-second UV pulse
High process efficiency and throughput
PowerLok
Pulse on Demand (PoD) operation cost reduction
TimeLok
Stable trigger-to-pulse delay
Laser data acquisition
Evaluation of laser performance best supported by optional ExiScone software
Ethernet interface
Fast remote control and data transfer
Touch panel hand-held terminal
Intuitive laser operation
Sealed and Purged Beam Path
Highest UV transmission efficiency and optics lifetime
Pulse shape analysis (optional)
Monitoring of nano-second laser pulses
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel