
High-Power Excimer Lasers
The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability.
LAMBDA SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).
Model Name | Wavelength (nm)
|
Max. Pulse Frequency (Hz)
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Max. Pulse Energy (mJ)
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Max. Power (W)
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LAMBDA SX C600 | 308
|
600
|
1000 | 600
|
LAMBDA SX E500 | 500
|
1000
|
500
|
LAMBDA SX Key Feature
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Customer Benefit
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500 or 600 Watts stabilized UV Power
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Fast, large area processing at lowest costs per Watt
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1 Joule nano-second UV pulse
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High process efficiency and throughput
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PowerLok
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Pulse on Demand (PoD) operation cost reduction
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TimeLok
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Stable trigger-to-pulse delay
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Laser data acquisition
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Evaluation of laser performance best supported by optional ExiScone software
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Ethernet interface
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Fast remote control and data transfer
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Touch panel hand-held terminal
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Intuitive laser operation
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Sealed and Purged Beam Path
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Highest UV transmission efficiency and optics lifetime
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Pulse shape analysis (optional)
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Monitoring of nano-second laser pulses
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Motorized optics mounts (optional)
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Remote beam adjustment via hand-held control panel
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