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LAMBDA SX
LAMBDA SX

LAMBDA SX

High-Power Excimer Lasers

The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability.

LAMBDA SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
LAMBDA SX C600
308
600
 1000
600
LAMBDA SX E500
500
1000
500

Applications

Application
Process
Material
• Ink-Jet Nozzle Drilling
• 3D-Structuring
• Roll-To-Roll Circuit Patterning
• Pulsed Laser Deposition
• Automotive Cylinder Hardening
• Excimer Laser Annealing
• Sequential Lateral Solidification
• Ablation-Material Removal
• Ceramic
• Glass
• Polymer
• Plastic
• Metal
• Semiconductor

Features & Benefits

LAMBDA SX Key Feature
Customer Benefit
High Stabilized UV Power
Fast, large area processing at lowest costs per Watt
ExiScope Software (optional)
Onboard logging and evaluation of laser parameters
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Adjustable Pulse Energy
Advanced process control
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel
Solid-State Switch
Maintenance-free operation
Purged, External Resonator Design
Highest beam stability and optics lifetime
Corona Preionization
Stable, homogeneous output
Metal Ceramic Tube
Extended tube lifetime
Energy Monitor
Preset, stabilized energy output